Document Type and Number:
Japanese Patent JPH0128312
Kind Code:
Y2
Application Number:
JP1269585U
Publication Date:
August 29, 1989
Filing Date:
January 31, 1985
Export Citation:
International Classes:
F04B43/04; F04B45/04; F04B45/047; H01L41/00; H01L41/08; H01L41/09; H02N2/00; (IPC1-7): F04B43/04; H01L41/08
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