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Patent Searching and Data


Document Type and Number:
Japanese Patent JPH01502789
Kind Code:
A
More Like This:
Application Number:
JP50407987A
Publication Date:
September 21, 1989
Filing Date:
June 04, 1987
Export Citation:
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International Classes:
H01J37/08; G01Q30/02; H01J49/06; H01J49/10; H01J49/14; H01J49/16; H01J49/26; H01J49/28; (IPC1-7): H01J37/08; H01J49/10; H01J49/26
Domestic Patent References:
JPS4719889A
Foreign References:
US4551599A1985-11-05
US3845305A
US4126781A
US4255656A
US4559449A
US4278706A
US4368252A



 
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