Document Type and Number:
Japanese Patent JPH0167751
Kind Code:
U
Application Number:
JP16346687U
Publication Date:
May 01, 1989
Filing Date:
October 26, 1987
Export Citation:
International Classes:
H01L21/52; H01L21/60; H01L21/603; (IPC1-7): H01L21/603; H01L21/52
Next Patent: JPH0167752