Document Type and Number:
Japanese Patent JPH0197573
Kind Code:
U
Application Number:
JP19336087U
Publication Date:
June 29, 1989
Filing Date:
December 18, 1987
Export Citation:
International Classes:
H01L21/52; H01L23/12; H05K1/02; H05K1/18; (IPC1-7): H05K1/02; H01L21/52; H01L23/12; H05K1/18
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