Document Type and Number:
Japanese Patent JPH0275741
Kind Code:
U
Application Number:
JP15585688U
Publication Date:
June 11, 1990
Filing Date:
November 29, 1988
Export Citation:
International Classes:
B23D15/04; B23D35/00; H01L23/50; (IPC1-7): H01L23/50; B23D15/04; B23D35/00
Next Patent: JPH0275742