Document Type and Number:
Japanese Patent JPH0296005
Kind Code:
U
Application Number:
JP471989U
Publication Date:
July 31, 1990
Filing Date:
January 18, 1989
Export Citation:
International Classes:
B25J13/00; B25J19/00; F16B9/00; H01L41/08; H01L41/09; (IPC1-7): F16B9/00; H01L41/08; B25J13/00; B25J19/00; H01L41/09
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