Document Type and Number:
Japanese Patent JPH03104760
Kind Code:
U
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Application Number:
JP1285490U
Publication Date:
October 30, 1991
Filing Date:
February 13, 1990
Export Citation:
International Classes:
H01L27/08; H01L23/58; (IPC1-7): H01L27/08; H01L23/56; H01L23/58