Document Type and Number:
Japanese Patent JPH03109341
Kind Code:
U
Application Number:
JP1754090U
Publication Date:
November 11, 1991
Filing Date:
February 23, 1990
Export Citation:
International Classes:
H01L21/301; H01L21/78; (IPC1-7): H01L21/78
Domestic Patent References:
| JPS636808B2 | 1988-02-12 | |||
| JPS51117870A | 1976-10-16 |