Document Type and Number:
Japanese Patent JPH03126048
Kind Code:
U
Application Number:
JP3536090U
Publication Date:
December 19, 1991
Filing Date:
March 30, 1990
Export Citation:
International Classes:
H01L21/56; (IPC1-7): H01L21/56
Domestic Patent References:
| JPS62206841A | 1987-09-11 | |||
| JPH01258403A | 1989-10-16 |