Document Type and Number:
Japanese Patent JPH0315822
Kind Code:
B2
Inventors:
YOKOCHI KISHIO
Application Number:
JP10947384A
Publication Date:
March 04, 1991
Filing Date:
May 31, 1984
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L23/44; H01L23/427
Next Patent: JPH0315823