Document Type and Number:
Japanese Patent JPH0332223
Kind Code:
B2
Inventors:
KAJIWARA RYOICHI
FUNAMOTO TAKAO
KATO MITSUO
SHIDA TOMOHIKO
MATSUZAKA KYO
WACHI HIROSHI
TAKAHASHI KAZUYA
FUNAMOTO TAKAO
KATO MITSUO
SHIDA TOMOHIKO
MATSUZAKA KYO
WACHI HIROSHI
TAKAHASHI KAZUYA
Application Number:
JP11736885A
Publication Date:
May 10, 1991
Filing Date:
May 30, 1985
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L23/473; H01L23/433
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