Document Type and Number:
Japanese Patent JPH0342815
Kind Code:
Y2
Application Number:
JP3878086U
Publication Date:
September 09, 1991
Filing Date:
March 17, 1986
Export Citation:
International Classes:
A47B83/04; A47B87/00; (IPC1-7): A47B87/00; A47B83/04
Next Patent: SUBSTRATE TREATING DEVICE