Document Type and Number:
Japanese Patent JPH0346165
Kind Code:
B2
Inventors:
INAMI SHIGERU
URATA TETSUKAZU
SAKAI IZUMI
URAKAWA YOICHI
URATA TETSUKAZU
SAKAI IZUMI
URAKAWA YOICHI
Application Number:
JP19176283A
Publication Date:
July 15, 1991
Filing Date:
October 14, 1983
Export Citation:
Assignee:
TOYO SANSO KK
International Classes:
B01D53/34; B01D53/46; H01L21/02
Next Patent: JPH0346166