Document Type and Number:
Japanese Patent JPH0359069
Kind Code:
U
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Application Number:
JP11762589U
Publication Date:
June 10, 1991
Filing Date:
October 06, 1989
Export Citation:
International Classes:
G03F7/16; B05C11/08; H01L21/027; H01L21/30; (IPC1-7): B05C11/08; H01L21/30; G03F7/16; H01L21/027
Next Patent: JPH0359070