Document Type and Number:
Japanese Patent JPH0359166
Kind Code:
U
Application Number:
JP11942689U
Publication Date:
June 11, 1991
Filing Date:
October 11, 1989
Export Citation:
International Classes:
B25B23/10; B25B15/00; H01L33/62; (IPC1-7): B25B23/10; B25B15/00
Domestic Patent References:
JP53162999B |
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