Document Type and Number:
Japanese Patent JPH0366186
Kind Code:
B2
Inventors:
MAEDA HAJIME
Application Number:
JP2243984A
Publication Date:
October 16, 1991
Filing Date:
February 07, 1984
Export Citation:
Assignee:
DAIFUKU KK
International Classes:
B61D27/00; B61B13/00; B61J3/10; B65G49/00; B65G69/20; G05D1/02; H01L21/02; H01L21/677