Document Type and Number:
Japanese Patent JPH0396328
Kind Code:
U
Application Number:
JP257790U
Publication Date:
October 02, 1991
Filing Date:
January 16, 1990
Export Citation:
International Classes:
B01J6/00; C01B33/12; H01L21/208; (IPC1-7): C01B33/12; B01J6/00; H01L21/208