Document Type and Number:
Japanese Patent JPH0410713
Kind Code:
Y2
Application Number:
JP16083987U
Publication Date:
March 17, 1992
Filing Date:
October 22, 1987
Export Citation:
International Classes:
C23C2/16; H05K3/24; (IPC1-7): H05K3/24; C23C2/16
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