Document Type and Number:
Japanese Patent JPH0418461
Kind Code:
U
Application Number:
JP5975490U
Publication Date:
February 17, 1992
Filing Date:
June 06, 1990
Export Citation:
International Classes:
G01N7/00; H01L29/84; (IPC1-7): H01L29/84; G01N7/00
Next Patent: JPH0418462