Document Type and Number:
Japanese Patent JPH0422121
Kind Code:
B2
Inventors:
FUJIWARA HIROAKI
Application Number:
JP21409385A
Publication Date:
April 15, 1992
Filing Date:
September 26, 1985
Export Citation:
Assignee:
UCHAMA KOGYO KK
International Classes:
B27J5/00; B27N3/02; E04C2/10; E04C2/30; E04F13/10; E04F15/04
Next Patent: PLASMA PROCESSING EQUIPMENT