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Document Type and Number:
Japanese Patent JPH045179
Kind Code:
B2
More Like This:
WO/2002/069040NOVEL POLYMERS, PROCESSES FOR POLYMER SYNTHESIS AND PHOTORESIST COMPOSITIONS
Application Number:
JP13255583A
Publication Date:
January 30, 1992
Filing Date:
July 20, 1983
Export Citation:
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International Classes:
C08F2/00; C08F2/50; C08F20/00; C08F20/26; C08F20/28; C08F32/00; C08F32/08; C08F290/00; C08F299/00; C08F299/02; G03F7/00; G03F7/004; G03F7/027; G03F7/031



 
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