Document Type and Number:
Japanese Patent JPH0453063
Kind Code:
U
Application Number:
JP9299990U
Publication Date:
May 06, 1992
Filing Date:
September 04, 1990
Export Citation:
International Classes:
C23C16/50; C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23C16/50; C23F4/00; H01L21/302
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