Document Type and Number:
Japanese Patent JPH0497862
Kind Code:
U
Application Number:
JP157091U
Publication Date:
August 25, 1992
Filing Date:
January 23, 1991
Export Citation:
International Classes:
C30B23/06; C30B23/08; C30B25/12; H01L21/203; (IPC1-7): C30B23/08; C30B23/06; C30B25/12; H01L21/203
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