Document Type and Number:
Japanese Patent JPH0523187
Kind Code:
Y2
Application Number:
JP9263086U
Publication Date:
June 14, 1993
Filing Date:
June 18, 1986
Export Citation:
International Classes:
H01L21/301; B26B27/00; B65H35/07; H01L21/78; (IPC1-7): B26B27/00; B65H35/07; H01L21/78
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