Document Type and Number:
Japanese Patent JPH0530215
Kind Code:
Y2
Application Number:
JP12265686U
Publication Date:
August 02, 1993
Filing Date:
August 08, 1986
Export Citation:
International Classes:
G07D9/00; G07F1/02; G07F7/04; H01L33/00; (IPC1-7): G07D9/00; G07F7/04; H01L33/00
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