Document Type and Number:
Japanese Patent JPH0530311
Kind Code:
B2
Abstract:
PURPOSE:To obtain a composite piezoelectric or pyroelectric sheet having high sensitivity, excellent primary workability by dispersing and solidifying particles of piezoelectric or pyroelectric sintered material on insulating polymer with which is uniformly coated a smooth carrier to form a sole layer, then removing skin layers, forming both electrodes on both side surfaces, and polarizing the electrodes. CONSTITUTION:Particles of piezoelectric or pyroelectric sintered material (e.g., sintered material of titanium lead zirconate) are pulverized and screened. A coating film 1 of solution of heat resistant thermosetting resin (e.g., polyamide resin) is formed of a knife coater on one side surface of an aluminum foil 3. The particles 4 are uniformly dispersed so as not to superpose (in dispersing density of 80-90 particles/m<2>). After the film 1 is solidified, the film is dipped in an aqueous ferric chloride bath to be etched, dried, and thermally cured by a flat plate press. The film is then polished with a sandpaper to expose the particles. Thin copper films are formed on both side surfaces by sputtering as electrodes. A voltage is applied between the electrodes to be polarized to obtain a composite sheet.
Inventors:
YANAGIDA TOMOYOSHI
TOKUDA HIROSHI
FUKASE TOSHIMITSU
NAKAGAWA KISAKU
TOKUDA HIROSHI
FUKASE TOSHIMITSU
NAKAGAWA KISAKU
Application Number:
JP20539285A
Publication Date:
May 07, 1993
Filing Date:
September 19, 1985
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
H01L41/45; G01J5/02; G01J5/34; G01K7/00; G01L1/16; H01G7/00; H01L37/02; H01L41/08; H01L41/22
Next Patent: JPH0530312