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Document Type and Number:
Japanese Patent JPH0532049
Kind Code:
B2
Application Number:
JP10434587A
Publication Date:
May 14, 1993
Filing Date:
April 30, 1987
Export Citation:
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Assignee:
TEIJIN LTD
International Classes:
A47L13/16; B05C1/02; B24D11/00; D03D25/00; D06M11/00; D06M11/05; D06M23/00; H01L21/304



 
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