Document Type and Number:
Japanese Patent JPH0534688
Kind Code:
B2
Inventors:
OOYAMA TAKASHIGE
KIRISAWA TADASHI
OOSUGA MINORU
KIRISAWA TADASHI
OOSUGA MINORU
Application Number:
JP5967682A
Publication Date:
May 24, 1993
Filing Date:
April 12, 1982
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01N27/26; G01N27/409; G01N27/416; G05D21/00; G05D21/02