Document Type and Number:
Japanese Patent JPH0542377
Kind Code:
Y2
Application Number:
JP18065886U
Publication Date:
October 26, 1993
Filing Date:
November 25, 1986
Export Citation:
International Classes:
G01N23/227; G01T1/185; G01T1/28; H01J37/244; H01J47/14; (IPC1-7): G01T1/28; G01T1/185
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