Document Type and Number:
Japanese Patent JPH0553056
Kind Code:
B2
Inventors:
RONARUDO HAABEI UIRUSON
ROBAATO UINSUTON SUTOORU
ROBAATO UINSUTON SUTOORU
Application Number:
JP24427585A
Publication Date:
August 09, 1993
Filing Date:
November 01, 1985
Export Citation:
Assignee:
GEN ELECTRIC
International Classes:
H01L23/522; H01L21/28; H01L21/285; H01L21/768; (IPC1-7): H01L21/285; H01L21/28; H01L21/285
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