Title:
【考案の名称】エネルギー分散型X線分光検出装置
Document Type and Number:
Japanese Patent JPH058481
Kind Code:
U
Inventors:
Satoshi Hosokawa
Application Number:
JP5639391U
Publication Date:
February 05, 1993
Filing Date:
July 19, 1991
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01T1/24; H01J37/252; (IPC1-7): G01T1/24; H01J37/252
Attorney, Agent or Firm:
Hiroshi Nirazawa (7 outside)