Title:
【発明の名称】線幅測定装置
Document Type and Number:
Japanese Patent JPH06100446
Kind Code:
B2
Inventors:
Hitoshi Tachikawa
Application Number:
JP27879886A
Publication Date:
December 12, 1994
Filing Date:
November 25, 1986
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/02; (IPC1-7): G01B11/02
Domestic Patent References:
| JP61251705A | ||||
| JP52109854U |
Attorney, Agent or Firm:
Yamashita
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