Title:
【発明の名称】GaAsウェーハの鏡面研磨液ならびに鏡面研磨方法
Document Type and Number:
Japanese Patent JPH06101457
Kind Code:
B2
Inventors:
Shigeo Katsura
Application Number:
JP13262086A
Publication Date:
December 12, 1994
Filing Date:
June 10, 1986
Export Citation:
Assignee:
Japan Energy Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C10M125/10; C10M125/18; C10M173/02; H01L21/306; C10N10/02; C10N40/22; (IPC1-7): H01L21/304; B24B37/00; C10M173/02
Domestic Patent References:
| JP5969932A | ||||
| JP4847766A |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)