Title:
【発明の名称】レジストパターン形成方法
Document Type and Number:
Japanese Patent JPH06105683
Kind Code:
B2
Inventors:
Toshihiko Tanaka
Morikami Mitsuaki
Morikami Mitsuaki
Application Number:
JP12932692A
Publication Date:
December 21, 1994
Filing Date:
April 23, 1992
Export Citation:
Assignee:
Soltec Co., Ltd.
International Classes:
G03F7/32; B81C99/00; H01L21/027; H01L21/30; H01L21/47; (IPC1-7): H01L21/027; G03F7/32
Attorney, Agent or Firm:
Shozo Yoshihara (1 person outside)
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