Title:
【発明の名称】半導体気相成長装置
Document Type and Number:
Japanese Patent JPH0612758
Kind Code:
B2
Inventors:
EHATA HITOSHI
Application Number:
JP6598783A
Publication Date:
February 16, 1994
Filing Date:
April 14, 1983
Export Citation:
Assignee:
TOSHIBA MACHINE CO LTD
International Classes:
H01L21/205; H01L21/31; (IPC1-7): H01L21/205; H01L21/31
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