Title:
【発明の名称】イオンビーム形成方法および液体金属イオン源
Document Type and Number:
Japanese Patent JPH0616383
Kind Code:
B2
Inventors:
TAMURA HIFUMI
TAGUCHI TADANORI
SHICHI HIROYASU
MITANI EISUKE
ISHITANI TOORU
TAGUCHI TADANORI
SHICHI HIROYASU
MITANI EISUKE
ISHITANI TOORU
Application Number:
JP7224884A
Publication Date:
March 02, 1994
Filing Date:
April 11, 1984
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J27/20; H01J27/26; H01J37/08; (IPC1-7): H01J37/08; H01J27/26
Domestic Patent References:
| JP58158839A | ||||
| JP5830055A |
Attorney, Agent or Firm:
Junnosuke Nakamura
Next Patent: クレーンの操縦装置