Title:
【考案の名称】帯状フィルムの表面粗さ測定装置
Document Type and Number:
Japanese Patent JPH062112
Kind Code:
U
Inventors:
Tokoi Yasuyuki
Application Number:
JP3872392U
Publication Date:
January 14, 1994
Filing Date:
June 08, 1992
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
G01B5/00; G01B5/28; (IPC1-7): G01B5/28; G01B5/00
Domestic Patent References:
| JPS5653055A | 1981-05-12 | |||
| JPS592267A | 1984-01-07 | |||
| JPS5760253A | 1982-04-12 |
Attorney, Agent or Firm:
Kenzo Matsuura
Next Patent: FORMATION OF THIN FILM