Title:
【発明の名称】改良されたロードロツク排気機構
Document Type and Number:
Japanese Patent JPH0621356
Kind Code:
B2
Abstract:
In a vacuum system for processing workpieces (15), a vacuum chamber (10) has a workpiece-entrance opening (23). Load lock means (12) for said entrance opening (23) include a door (22) for sealing the outside of said opening (23), a movable closure member within the chamber to seal the entrance opening from the interior of the vacuum chamber, and forming a load lock chamber when the door (22) and closure member (160) are both in closed positions. The load lock chamber (12) is connected to a roughing pump and is separately connected to a high vacuum pump through a pumping opening in one or the other of said internal closure member or said door (22). A large aperture valve (146) is provided in said pumping opening. In one embodiment said pumping opening is connected via suitable conduits (168) and valves (140) to a roughing pump and also to a high vacuum pump. In another embodiment said pumping opening is connected only to the high vacuum pump, and the roughing pump is connected to the load lock chamber (12) via an aperture (164) in the edge of the entrance opening in the processing chamber wall.
Inventors:
JEEMUSU DABURYU EIKUREI
Application Number:
JP9617585A
Publication Date:
March 23, 1994
Filing Date:
May 08, 1985
Export Citation:
Assignee:
VARIAN ASSOCIATES
International Classes:
C23C14/56; H01L21/677; F04B37/16; H01L21/203; H01L21/67; (IPC1-7): C23C14/56
Attorney, Agent or Firm:
Sumio Takeuchi (2 outside)