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Patent Searching and Data


Title:
【考案の名称】縦型拡散・CVD装置
Document Type and Number:
Japanese Patent JPH062682
Kind Code:
U
Inventors:
泉 学
Application Number:
JP4759592U
Publication Date:
January 14, 1994
Filing Date:
June 15, 1992
Export Citation:
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Assignee:
国際電気株式会社
International Classes:
H01L21/22; C23C16/44; H01L21/205; (IPC1-7): H01L21/22
Domestic Patent References:
JPH0484420A
Attorney, Agent or Firm:
三好 祥二