Title:
【考案の名称】変位センサ
Document Type and Number:
Japanese Patent JPH0640807
Kind Code:
U
Inventors:
Ryoki Odagawa
Kei Imaizumi
Kei Imaizumi
Application Number:
JP8143792U
Publication Date:
May 31, 1994
Filing Date:
October 30, 1992
Export Citation:
Assignee:
TDK Corporation
International Classes:
G01C9/06; G01C9/10; G01P15/135; (IPC1-7): G01C9/06; G01C9/10; G01P15/135
Attorney, Agent or Firm:
Abe Mijiro