【発明の名称】珪酸エステルおよび金属酸化物から多層セラミック被膜を形成する方法

Title:

【発明の名称】珪酸エステルおよび金属酸化物から多層セラミック被膜を形成する方法

Document Type and Number:

Japanese Patent JPH0642479

Kind Code:

B2

Abstract:

This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2/metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.

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Inventors:

ROOREN ANDORIYUU HARUSUKA
KIISU UINTON MAIKERU
REO TAAHEI

Application Number:

JP33034687A

Publication Date:

June 01, 1994

Filing Date:

December 28, 1987

Export Citation:

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Assignee:

DOW CORNING

International Classes:

C23C16/32; C23C16/34; C23C16/36; C23C16/50; C23C18/12; H01L21/314; H01L21/316; H01L21/318; H01L23/29; H01L23/31; (IPC1-7): H01L21/316; C23C16/32; C23C16/34; C23C16/36; C23C16/50; C23C18/12; H01L21/314

Attorney, Agent or Firm:

Aoki Akira (3 outside)

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