【発明の名称】石英ガラス製ウエーハボート保持治具

Title:

【発明の名称】石英ガラス製ウエーハボート保持治具

Document Type and Number:

Japanese Patent JPH0648679

Kind Code:

B2

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Inventors:

INAGI KYOICHI
KIMURA HIROSHI
NAKAMURA KAZUO
KENMOCHI KATSUHIKO

Application Number:

JP9980090A

Publication Date:

June 22, 1994

Filing Date:

April 16, 1990

Export Citation:

Assignee:

SHINETSU SEKIEI KK

International Classes:

H01L21/22; H01L21/324; (IPC1-7): H01L21/22; H01L21/324

Domestic Patent References:

JP57191040U

Attorney, Agent or Firm:

Ryoichi Yamamoto (1 person outside)

Next Patent: ATTITUDE CONTROL DEVICE FOR HUNG LOAD