Title:
【発明の名称】物品の表面に塗った保護用ポリマー被覆剤中の溶液の乾燥方法
Document Type and Number:
Japanese Patent JPH06502341
Kind Code:
A
Abstract:
PCT No. PCT/SU91/00088 Sec. 371 Date Mar. 2, 1993 Sec. 102(e) Date Mar. 2, 1993 PCT Filed May 8, 1991 PCT Pub. No. WO92/19925 PCT Pub. Date Nov. 12, 1992.The method and apparatus operate to complete the following stages. At the first stage the coating is held at room temperature in the time interval from 20 s to 1 hour, depending on the type of polymer coating. At the second stage the coating is held at an elevated temperature under excessive pressure, sufficient for suppressing propagation of microcracks in such time interval so that at reaching the predetermined protective properties the thermodestruction of the polymer coating does not occur. At the third stage performed is the cooling of the coating to room temperature. According to the invention, the excessive pressure is built up at the first stage and maintained at the cooling stage. The invention may find application in manufacture of integrated circuits, as well as for the formation of thin polymer insulation coatings.
Inventors:
Peremishev, Vladimir Alexandrovich
Application Number:
JP50963991A
Publication Date:
March 17, 1994
Filing Date:
May 08, 1991
Export Citation:
Assignee:
Naucuno Prozvodvennaya Filma Actsionernoe Obschetovo Zakuritogo Tipa "Technologya Obordovanier Materia" (Ah/Oh"Tom")
International Classes:
B05C9/14; B05D3/00; B05D3/02; B05D3/04; B05D3/12; F26B3/00; B05C9/12; F26B7/00; F26B15/12; F26B15/18; H01L21/027; H01L21/30; H01L21/56; (IPC1-7): B05C9/14; B05C9/12; B05D3/12; F26B3/00; H01L21/027; H01L21/56
Attorney, Agent or Firm:
Soichi Takezawa