Title:
【発明の名称】静電容量プローブを用いる座標測定方法及び装置
Document Type and Number:
Japanese Patent JPH06503878
Kind Code:
A
Abstract:
The surface parameters and characteristics of a conductive workpiece are determined by applying a voltage between the workpiece and a capacitance probe having proximity sensing capabilities, and moving the probe in two or three co-ordinate axes relative to the workpiece while measuring the capacitance between the probe and workpiece, and controlling the probe velocity and/or direction within a stand-off band adjacent to the workpiece as a function of the capacitance value measured for purposes of effecting significant real time process controls, and determining the workpiece surface parameters as a function of the probe movement and capacitance measured.
Inventors:
RHOADES LAWRENCE J (US)
RESNICK RALPH L (US)
ROSE JOHN R (US)
RESNICK RALPH L (US)
ROSE JOHN R (US)
Application Number:
JP51534791A
Publication Date:
April 28, 1994
Filing Date:
September 04, 1991
Export Citation:
Assignee:
EXTRUDE HONE CORP (US)
International Classes:
G01B7/34; G01B7/004; G01B7/28; G01N37/00; (IPC1-7): G01B7/34
Attorney, Agent or Firm:
Ichiro Sugawara