Title:
【発明の名称】光規定可能なインターレベル誘電体
Document Type and Number:
Japanese Patent JPH06506308
Kind Code:
A
Abstract:
A predetermined pattern of a dielectric polymer is formed on a substrate from either a first prepolymer which is the ether of the oligomeric condensation product of dihydric phenol and formaldehyde or a mixture of said oligomer with a second prepolymer which is the ether of the oligomeric condensation product of a dialdehyde and 3 to 4 moles of a phenol.
Inventors:
Zpan Chic, Joseph James
Application Number:
JP50943992A
Publication Date:
July 14, 1994
Filing Date:
March 25, 1992
Export Citation:
Assignee:
Allied-Signal Incorporated
International Classes:
C08G8/20; G03F7/027; G03F7/038; H01B3/42; H01L21/312; H05K1/03; H05K3/46; (IPC1-7): G03F7/038; C08G8/20; G03F7/027; H01B3/42; H01L21/312; H05K1/03; H05K3/46
Attorney, Agent or Firm:
Kyozo Yuasa (6 people outside)