Title:
【発明の名称】ガス供給装置
Document Type and Number:
Japanese Patent JPH06507117
Kind Code:
A
Inventors:
Page, john, kenneth, ruric
Application Number:
JP50901392A
Publication Date:
August 11, 1994
Filing Date:
May 08, 1992
Export Citation:
Assignee:
Caller Air Separation Limited
International Classes:
B01D53/22; F17C13/04; G05D16/06; G05D16/16; (IPC1-7): B01D53/22
Attorney, Agent or Firm:
Kaoru Furuya (2 outside)