Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JPH0670998
Kind Code:
B2
Inventors:
Kazuhiko Tsuji
Application Number:
JP2032685A
Publication Date:
September 07, 1994
Filing Date:
February 05, 1985
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L23/52; H01L21/31; H01L21/3205; (IPC1-7): H01L21/3205
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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