Title:
【発明の名称】コンタクトホール形成工程用モニタパターン
Document Type and Number:
Japanese Patent JPH07105388
Kind Code:
B2
Inventors:
Koji Watanabe
Application Number:
JP8761388A
Publication Date:
November 13, 1995
Filing Date:
April 08, 1988
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/3205; H01L21/66; H01L23/52; (IPC1-7): H01L21/3205; H01L21/66
Domestic Patent References:
| JP59217340A | ||||
| JP61144859A | ||||
| JP56114356A |
Attorney, Agent or Firm:
Teiichi
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