【発明の名称】窒化アルミニウムの不純物除去法

Title:

【発明の名称】窒化アルミニウムの不純物除去法

Document Type and Number:

Japanese Patent JPH07106886

Kind Code:

B2

Inventors:

Kajita Susumu
Noboru Hashimoto

Application Number:

JP34044190A

Publication Date:

November 15, 1995

Filing Date:

November 30, 1990

Export Citation:

Assignee:

MATSUSHITA ELECTRIC WORKS,LTD.

International Classes:

C01B21/072; (IPC1-7): C01B21/072

Attorney, Agent or Firm:

Shigeji Sato (1 person outside)

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