【発明の名称】光学式変位測定装置 - MATSUSHITA ELECTRIC WORKS,LTD.

Title:

【発明の名称】光学式変位測定装置

Document Type and Number:

Japanese Patent JPH07107483

Kind Code:

B2

Inventors:

Yuji Takada
Ikari Sou
Satake Sada

Application Number:

JP27124287A

Publication Date:

November 15, 1995

Filing Date:

October 27, 1987

Export Citation:

Assignee:

MATSUSHITA ELECTRIC WORKS,LTD.

International Classes:

G01C3/06; G01B11/00; G01C3/00; (IPC1-7): G01C3/06; G01B11/00

Domestic Patent References:

Attorney, Agent or Firm:

Kurata Masahiko

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